Quartz Wafer mkpụrụ
Quartz Wafer Substrates bụ wafer ndị a na-eme nke ọma bụ nke dị elu- purity quartz (SiO₂), nke a na-ejikarị na semiconductor, optoelectronics, micro{1}eletrọmechanical sistemu (MEMS), ngwa anya na mpaghara ndị ọzọ.
Nkọwa
Njirimara ihe
- Ịdị ọcha dị elu:Emere ya site na quartz sịntetik (dịka ọmụmaatụ, silica fused), nke nwere ịdị ọcha dị oke elu (Karịrị ma ọ bụ nhata 99.99%) yana obere adịghị ọcha iji zere imetụta arụmọrụ ngwaọrụ.
- Nkwụsi ike okpomọkụ:Ọnụ ọgụgụ dị ala nke mgbasawanye thermal (≈0.55×10⁻⁶/ ogo) na elu - okpomọkụ na-eguzogide (ntụgharị nro ~ 1600 degrees), dabara maka usoro okpomọkụ dị elu -.
- Arụmọrụ anya:Ogologo mgbasa ozi sara mbara (UV ruo IR), yana nnyefe UV pụrụ iche, dị mma maka fotomasks, lenses, wdg.
- Ike kemịkalụ:Na-eguzogide acid na alkalis (ma e wezụga hydrofluoric acid), dabara maka usoro etching mmiri.
- Ihe mkpuchi eletrik:High resistivity (>10¹⁶ Ω·cm), dị mma maka ihe mkpuchi mkpuchi ma ọ bụ ngwaọrụ ugboro ugboro ({1}).
Ngwa
Mmepụta Semiconductor
Ngwa fotomask -
- EUV akụrụngwa lithography
- Ndị na-ebu nhazi wafer
Photonics & Optoelectronics
- Ngwa ntụ ntụ ebili mmiri anya
- Laser diode arịọnụ
- Ngwa mgbako Quantum
Ngwa Ọpụrụiche
- MEMS resonator bases
- oghere teliskop optics
Sistemụ laser ike - dị elu{1}
Usoro nrụpụta
- Ngwakọta ihe akụrụngwa:Emepụtara site na ntinye uzuoku (dịka ọmụmaatụ, SiCl₄ oxidation) ma ọ bụ sachaa quartz eke.
- Agbaze na Ịkpụ:Okpomọkụ dị elu- na-esote site na ịjụ oyi n'ime ingots ma ọ bụ ịbịaru ozugbo n'ime mkpanaka.
- Ịcha:Ebibie ya n'ime obere wafer na-eji waya diamond ma ọ bụ ịkpụ laser.
- Echicha na ihicha:Chemical mechanical polishing (CMP) na-enweta nanometer{0}}ọkwa ire ụtọ.
- Nchacha na nyocha:Mwepụ nke ụmụ irighiri ihe na ihe ndị na-emebi ọla, na-esote ntụpọ na nnwale oke.
Njirimara
|
Njirimara anụ ahụ |
Ụkpụrụ |
|
Ịdị ọcha |
＞99.99% |
|
Njupụta |
2.2g/cm3 |
|
nghọta |
＞90% |
|
Mohs ike |
5.5--6.5 |
|
Ebe nrụrụ |
1280 ogo |
|
Ebe Ntụgharị |
1750 ogo |
|
Ebe na-ekpo ọkụ |
1250 ogo |
|
Okpomọkụ akọwapụtara (20 - 350 ogo) |
670J/n'arọ. ogo |
|
Nrụpụta okpomọkụ (ogo 20) |
1.4W/m. ogo |
|
Nrụpụta ọkụ (w/mk, ogo 1000) |
1.0-1.2 |
|
Ntụgharị uche |
1.4585 |
|
Ọnụọgụ nke Thermal Mgbasawanye |
5.510 -7cm/cm. ogo |
|
Ọkụ na-ekpo ọkụ - na-arụ ọrụ |
1750--2050 ogo |
|
Okpomọkụ ọrụ obere oge - |
1450 ogo |
|
Ogologo oge - okpomọkụ ọrụ |
1100 ogo |
|
Njirimara kemịkalụ |
Ụkpụrụ |
|
Acid na-eguzogide ọgwụ |
Acid siri ike (ma e wezụga HF), alkali siri ike, ngwọta organic |
|
Okpomọkụ dị elu na-eguzogide corrosion |
Magburu onwe |
|
Ọdịnaya adịghị ọcha ọla |
5 ppm |
|
Ngwa eletriki |
Ụkpụrụ |
|
Nguzogide |
7107Ω.cm |
|
Ike mkpuchi |
250 ~ 400kv / cm |
|
Dielectric Constant |
3.7~3.9 |
|
Ọnụọgụ Absorption nke Dielectric |
＜410-4 |
|
Ọnụego ọnụọgụ nke Dielectric Loss |
＜110-4 |
|
Ihe eji arụ ọrụ |
Ụkpụrụ |
|
Ike mkpakọ |
1100MPa |
|
67MPa |
|
|
Ike ọdụdọ |
48MPa |
|
Oke Poisson |
0.14~0.17 |
|
Modul nke Young |
72000MPa |
|
Shear Modul |
31000MPa |
FAQ
Q1: Gịnị bụ kacha quartz wafer substrates size dị?
A: Standard mmepụta ruo 300mm dayameta, na 450mm prototypes dị maka R&D.
Q2: Ị nwere ike ịnye profaịlụ ọkpụrụkpụ ahaziri iche?
A: Ee - anyị nwere ike iwepụta:
- Wafers (maka ngwa laser)
- Nhazi nke dabara nke ọma
Ebe a haziri - Mesa{1}
Q3: Kedu usoro nhicha ị na-akwado?
A: Usoro dị ọcha ọkọlọtọ RCA:
1. Organic mwepụ (H₂SO₄:H₂O₂)
2. Ionic nhicha (HCl: H₂O₂)
3. HF{1}} ikpeazụ maka elu mmiri
Ihe nchịkọta dị ọkụ: Quartz wafer mkpụrụ, China quartz wafer mkpụrụ ndị na-emepụta ihe, ndị na-ebu, ụlọ ọrụ
Zipu ozi
Might nwekwara ike-amasị
